UNIT Celerity - 750-001-A2343 - Mass Flow Controller, UFC-8565C, 20 sccm Argon

The Celerity 750-001-A2343 is a mass flow controller (MFC) from the UFC-8565C series, designed for precise control of gas flow in semiconductor manufacturing and other high-precision applications. Key features include:

• Flow Rate: Calibrated for a maximum flow rate of 20 standard cubic centimeters per minute (sccm).

• Gas Compatibility: Specifically configured for Argon (Ar) gas, ensuring accurate and reliable performance with this gas type.

• Valve Type: Normally Closed (NC) valve design, providing safety by preventing gas flow when the controller is not powered or active.

• Fittings: Equipped with Downport C-Seal fittings, facilitating secure and leak-tight connections in gas delivery systems.

• Pressure Rating: Maximum operating pressure of 500 PSI (approximately 3,500 kPa), suitable for various industrial applications.

• Response Time: Designed for fast response, ensuring quick adjustments to flow rates as process conditions change.

• Digital Communication: Supports digital communication protocols, allowing for integration into automated process control systems.

This mass flow controller is ideal for applications requiring precise gas flow control, such as plasma etching, chemical vapor deposition (CVD), and other semiconductor fabrication processes.